7. ??????? 5???
Process Module
?? ??
Wafer Loading Unit (EFEM)
Wafer Transfer Unit
Power & Control Unit
Vacuum & Scrubber Unit
? ATM Robot
? Wafer Aligner
? EFEM Unit
? Transfer Chamber
? Vacuum Robot
? Main Power Box
? Remote Control Rack
? Vacuum Pump
? Scrubber
8. ??????? 5???
Process Module
?? ??
Wafer Loading Unit (EFEM)
Wafer Transfer Unit
Power & Control Unit
Vacuum & Scrubber Unit
? ATM Robot
? Wafer Aligner
? EFEM Unit
? Transfer Chamber
? Vacuum Robot
? Main Power Box
? Remote Control Rack
? Vacuum Pump
? Scrubber
Transfer Module
Docking
EFEM Docking
Power ?? & Control
Vacuum ?? & Gas ??
9. ??????? 5???
Power & Control Unit
Vacuum & Scrubber Unit
? Main Power Box
? Remote Control Rack
? Vacuum Pump
? Scrubber
? ?????????
10. ??????? 5???
3rd Floor (Line)
2nd Floor (Sub FAB)
Basement (Plenum)
Main Power
Box
Control
Rack
Scrubber
Main ??
Pump
? ??? ??
11. ??????? 5???
Gas ?? ??
GN2 ?? ??
?? ?? ??
Air ?? ??
???(PCW) ?? ??
?? Gas ?? ??
? ???? ??
12. ??????? 5???
Gas ?? ??
GN2 ?? ??
?? ?? ??
Air ?? ??
???(PCW) ?? ??
?? Gas ?? ??
? ???? ??