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plasma in ion source and sputtering systems

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Dr. Basanta Kumar Parida

This document discusses combining magnetron sputtering plasma and ion source plasma technologies. It shows views of a system that uses both a magnetron sputtering process and ion source, as well as a full view of the combined system and a view of the combined system connected to a power controller rack.

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Magnetron Sputtering plasma Magnetron Sputtering plasma Ion source plasma
Combined system Sputtering + ion source Magnetron Sputtering side view
Magnetron Sputtering +ion source Magnetron Sputtering +ion source full view
Magnetron Sputtering + ion source with power controller rack

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plasma in ion source and sputtering systems