plasma in ion source and sputtering systems
Download as pptx, pdf0 likes147 views
This document discusses combining magnetron sputtering plasma and ion source plasma technologies. It shows views of a system that uses both a magnetron sputtering process and ion source, as well as a full view of the combined system and a view of the combined system connected to a power controller rack.
1 of 4
Download to read offline
More Related Content
More from Dr. Basanta Kumar Parida (20)
PPTX
binary compound surface nanopatterning using ion beam, nano ripple, nanorippleDr. Basanta Kumar Parida?
binary compound surface nanopatterning using ion beam, nano ripple, nanorippleDr. Basanta Kumar Parida
?
Recently uploaded (20)
PDF
Decision support system in machine learning models for a face recognition-bas...TELKOMNIKA JOURNAL?
PDF
Validating a Citizen Observatories enabling Platform by completing a Citizen ...Diego L┏pez-de-Ipi?a Gonz│lez-de-Artaza?
Validating a Citizen Observatories enabling Platform by completing a Citizen ...Diego L┏pez-de-Ipi?a Gonz│lez-de-Artaza
?
Ad
plasma in ion source and sputtering systems
- 1. Magnetron Sputtering plasma Magnetron Sputtering plasma Ion source plasma
- 2. Combined system Sputtering + ion source Magnetron Sputtering side view
- 3. Magnetron Sputtering +ion source Magnetron Sputtering +ion source full view
- 4. Magnetron Sputtering + ion source with power controller rack