Personal Information
Organization / Workplace
Moscow, Russian Federation Russian Federation
Occupation
Facilities/Equipment/System Engineer
Industry
Electronics / Computer Hardware
About
I've got about 5 years of experience of working with AMAT Endura tool on different kind of chambers (Std. Ti, HTHU Al, Durasource TTN, PCII, RPC, IMP Ti, Std. Co, TxZ+ TiN, SIP EnCoRe TaN/Ta, SIP EnCoRe Cu). My main responsibility is process but I've got also skill to work with hardware. For me is not a problem to change process kit and target, clean up a chamber, calibrate robots and heaters (process position or temperature) and etc. I'm sure that process and hardware is a one system and knowledge of hardware many times helped me during process troubleshooting. I continuously make different tests and experiments to receive more information about process and influence input factors on fi...
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