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Boson Techno Systems Pvt. LtdSemiconductor
& Thin Film Coating Division
Tuesday,
February 28, 2017
1
Prepared By  Rajendra Kumar Singh
Asst. Manager  Sales & Marketing
Boson Techno Systems Pvt. Ltd .
Contents:
 Company Overview
 Vision & Mission
 Our Team & Presence
 Whats new?
 Branches & Divisions
 Our Products
 Valued Customers
 Recent Activities
 Latest Market News
Tuesday,
February 28, 2017
2
Company Overview
Tuesday,
February 28, 2017
3
Tuesday,
February 28, 2017
4
 Year of Establishment: 2010
 Headquarters: Boson Techno Systems Pvt. Ltd., Gurgaon
 Nature of Business: Distribution of State of the Art technology
products and service support
 Human Resource: Technically skilled and experienced Sales,
Technical and Back-end Staff
 Focus Industry: Defense, Aerospace, DRDO units, Automotive
and Semiconductor Industry
 Products: Semiconductor, Electronics, Precision Industry,
Various Chambers and Shakers
Vision & Mission
Tuesday,
February 28, 2017
5
VISION:
 Visualizing a tremendous potential by bringing state-of-the-art technology for
meeting the requirements of worldwide customers.
 Our vision is to offer the best products and services to our customers, to always
exceed customer expectations resulting in customer delight.
MISSION:
 To become the last stop for its customers in providing absolute quality services and
to maintain a long term business relationship with team.
Tuesday,
February 28, 2017
6
Our Team and Presence
Tuesday,
February 28, 2017
7
 We are a group of technocrats with
20+ years of professional
experience in the same field from
MNCs.
 We also have a highly experienced,
skilled and focused sales and
service team.
 We have total seven offices in
North, West and South India.
Tuesday,
February 28, 2017
8
Tuesday,
February 28, 2017
9
Whats New?
Tuesday,
February 28, 2017
10
 Boson is soon going to start a manufacturing set up in Delhi in a joint
venture with Haida International Equipment Co. Ltd. with an
investment of about $500,000.
 Haida is a US registered company having its manufacturing base in
China.
 The plant will have a capacity of manufacturing all kinds of chambers,
i.e., climatic, thermal shock, rain, dust, walk-in, ozone etc.
 In the second phase, we will be manufacturing various testing
equipments, i.e., UTM, furniture testing, food testing etc.
Tuesday,
February 28, 2017
11
Our Branches & Divisions
Tuesday,
February 28, 2017
12
Boson Techno Systems Pvt. Ltd.
Sales Divisions
Industrial Testing,
Quality and Process
Equipment Division
Defense and
Aerospace Division
Semi-Conductor and
Thin Film Coating
Division
Tuesday,
February 28, 2017
13
Semiconductor and Thin Film Coating Division
Plasma Cleaner & Asher Systems  Diener Electronic GmbH , Germany
Tuesday,
February 28, 2017
14
Elettrorava - Italy
Tuesday,
February 28, 2017
15
THIN FILM DEPOSITION SYSTEM
PECVD DEPOSITION SYSTEMS
SPUTTERING DEPOSITION SYSTEMS
ELECTRON BEAM DEPOSITION SYSTEMS
ION BEAM DEPOSITION SYSTEMS
HWCVD AND THERMAL EVAPORATION SYSTEMS
MULTICHAMBER SYSTEMS
THIN FILM DEPOSITION APPLICATIONS
AUTOMATIC VACUUM AND DEPOSITION CONTROL
Ultech Co. Ltd  South Korea
PLD-S Series (Spherical type Pulsed LASER
deposition system)
Application :
 Focusing the high power pulsed laser beam to
strike a target
 Oxide compound deposition in oxygen
atmosphere
 Ferromagnetic / Dielectric / magneto resistive
material deposition
Tuesday,
February 28, 2017
16
DRIE Series ( Deep Reactive Ion Etching system )
Application :-
 Bulk / Poly silicon etching (MEMS & NANO)
 Dielectrics etching (SiO2, Si3N4, etc.)
 Compound semiconductors etching
 Polyimide etching
Tuesday,
February 28, 2017
17
Application :
 Silicon oxide deposition (Wet / Dry / Pyrogenic)
 Silicon nitride deposition
 Poly silicon deposition
 N-type doped poly silicon deposition
 Low temperature oxidation (LTO)
 BSG/ PSG / BPSG
 Oxy-nitride deposition
 Drive-in / Diffusion
 Anneal
Tuesday, February
28, 2017
18
VLF Series ( Vertrical LPCVD/furnace system )
SPACE Series ( ALD system)
Application
 High-k gate dielectrics
 Diffusion barriers
 High-k dielectrics
 Passivation layers
 Transparent conductors
Tuesday,
February 28, 2017
19
GRABO Series ( Grapnene/CNT/SiGe/SiC CVD system )
Application :
 Silicon nano wire growing
 Carbon nano tube CVD
 SiC epitaxy
Tuesday,
February 28, 2017
20
UTS Series (Spin coater system )
Application :
 Photoresist(PR) coating for defining patterns in
microcircuit fabrication
 Dielectric/insulating layers coating for microcircuit
fabrication (polymers, SOG, Silk, etc.)
 Magnetic disk coating (magnetic particle
suspensions, head lubricants, etc.)
 Flat screen display coating (anti-reflection,
conductive oxide, etc.)
Tuesday,
February 28, 2017
21
SPC Series(Spray Coater)
Application :
 Photoresist(PR) or thin film coating
 Films coating for 3D structured pattern (V-
groove, U-groove, Cavity, Channel, Other 3D
Structure, etc.)
 Electroplating mold
 Sacrificial layer coating
 Electrical pattern connection
Tuesday,
February 28, 2017
22
UTR Series ( Rapid Thermal process system )
Application
 Rapid thermal (anneal) process
 Thin gate oxidation (Nano device)
 Eutectic bonding (Reactive metal bonding)
 Silicide formation
 Silicide junction formation
Tuesday,
February 28, 2017
23
WET BENCH SYSTEM
Application
 Rapid thermal (anneal) process
 Thin gate oxidation (Nano device)
 Eutectic bonding (Reactive metal bonding)
 Silicide formation
 Silicide junction formation
Tuesday,
February 28, 2017
24
Capres Applied Research  Denmark
Four Point Probe Resistivity Measurement
System
Tuesday,
February 28, 2017
25
KBTEM OMO Belarus
Tuesday,
February 28, 2017
26
Pattern Generator & Mask Inspection
Tuesday,
February 28, 2017
27
Double Side Mask Aligner & Wafer Inspection
Tuesday,
February 28, 2017
28
Wafer Inspection System
Mask Aligner System
Planar Corporation  Belarus
Chip Preparation Equipment :Prober (provide the contact between probes and IC contact pads. )
Tuesday,
February 28, 2017
29
Wafer Grinder and Polishing System
Tuesday,
February 28, 2017
30
Wafer Grinder System
Wafer Polishing System
Semiautomatic Wafer Dicing Saw
Tuesday,
February 28, 2017
31
Die Control and Cassetting Systems
Tuesday,
February 28, 2017
32
Die Bonder
Tuesday,
February 28, 2017
33
Automatic Wire Bonder
Tuesday,
February 28, 2017
34
Wafer Bonder
Tuesday,
February 28, 2017
35
Wafer Scriber System
Tuesday,
February 28, 2017
36
CXsemi Company Limited  Taiwan
Surface Inspection System - Model No.: KLA-Tencor Surfscan 6420
Tuesday,
February 28, 2017
37
Film Thickness Measurement System
Model no.: FilmChek AS150 Cxsemi
Tuesday,
February 28, 2017
38
Optical Profiler - Optiphot 200
Tuesday,
February 28, 2017
39
UltraT Equipment USA  Mask Cleaning System
Tuesday,
February 28, 2017
40
Unitemp  Germany
Vaccum Reflow Soldering System RTA/RTP Ovens
Tuesday,
February 28, 2017
41
JFP MICROTECHNIC  France
Semi-Automatic Wire Bonder - JFP Model WB100-1& WB200-2
Tuesday,
February 28, 2017
42
FRT GmbH  Germany
Non Contact Optical Surface Profiler
Tuesday,
February 28, 2017
43
Linn High Therm GmbH - Germany
RESISTANCE HEATING
Batch
Front loader
Bottom loader / elevator
Top loader
Tube furnaces
High pressure furnaces
Laboratory furnaces
Continuous Conveyor / belt
Roller / Pusher furnaces
Rotary hearth kilns
Rotary tube furnaces
Laboratory furnaces
Tuesday,
February 28, 2017
44
Semicon Consumables Materials
 Sputtering Target  Vinkarola Instruments -USA , Applied Science Korea , QRS material USA
 Photomasks  HTA Photomask , Telic USA
 Silicon Wafer & SOI wafer  SOITECH France , ICEMOS UK , PM Optics USA , LATECH Singapore , Micro Chemicals-
Germany, Atecom Taiwan
 RF Cearamic Packages & Combo Lid for hybrid & Microwave Semiconductor Devices  Metal life Korea , Materian USA
 Au Bonding wire & Ribbon , Al Bonding wire , Cu Bonding wire , Solder Alloy  Atecom Taiwan
 Glass wafer For MEMS  Wafer Plus Taiwan
 Photoresist ( Positive & Negative , E- beam resist)  Microresist Germany
 Thin Film Substrate - MTI Corporation USA
 Laser Diode Bars & Chip  DILAS Diodenlaser GmbH  Germany
 ITO Coated Glass Plates, High Purity Evaporation materials  Vin Karola Instruments
 GaN Template , EPI wafer  Kyma Technologies USA
 SiC Wafer, GaN Wafer, GaAs Wafer, Germanium Wafer, Gallium nitirde wafer, epi wafer, GaN epi wafer, epitaxial wafer,
InGaAs epitaxial wafer, GaN epitaxial wafer, LT-GaAs - Xiamen Powerway Advanced Material Co.,Ltd. - China
Tuesday,
February 28, 2017
45
Our Valued Customers
Tuesday,
February 28, 2017
46
Defence Research
& Development Organisation
Central Electronics
Engineering Research Institute Tuesday,
February 28, 2017
47
Tuesday,
February 28, 2017
48
Tuesday,
February 28, 2017
49
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Boson semicon division product range 2017

  • 1. Boson Techno Systems Pvt. LtdSemiconductor & Thin Film Coating Division Tuesday, February 28, 2017 1 Prepared By Rajendra Kumar Singh Asst. Manager Sales & Marketing Boson Techno Systems Pvt. Ltd .
  • 2. Contents: Company Overview Vision & Mission Our Team & Presence Whats new? Branches & Divisions Our Products Valued Customers Recent Activities Latest Market News Tuesday, February 28, 2017 2
  • 4. Tuesday, February 28, 2017 4 Year of Establishment: 2010 Headquarters: Boson Techno Systems Pvt. Ltd., Gurgaon Nature of Business: Distribution of State of the Art technology products and service support Human Resource: Technically skilled and experienced Sales, Technical and Back-end Staff Focus Industry: Defense, Aerospace, DRDO units, Automotive and Semiconductor Industry Products: Semiconductor, Electronics, Precision Industry, Various Chambers and Shakers
  • 6. VISION: Visualizing a tremendous potential by bringing state-of-the-art technology for meeting the requirements of worldwide customers. Our vision is to offer the best products and services to our customers, to always exceed customer expectations resulting in customer delight. MISSION: To become the last stop for its customers in providing absolute quality services and to maintain a long term business relationship with team. Tuesday, February 28, 2017 6
  • 7. Our Team and Presence Tuesday, February 28, 2017 7
  • 8. We are a group of technocrats with 20+ years of professional experience in the same field from MNCs. We also have a highly experienced, skilled and focused sales and service team. We have total seven offices in North, West and South India. Tuesday, February 28, 2017 8
  • 11. Boson is soon going to start a manufacturing set up in Delhi in a joint venture with Haida International Equipment Co. Ltd. with an investment of about $500,000. Haida is a US registered company having its manufacturing base in China. The plant will have a capacity of manufacturing all kinds of chambers, i.e., climatic, thermal shock, rain, dust, walk-in, ozone etc. In the second phase, we will be manufacturing various testing equipments, i.e., UTM, furniture testing, food testing etc. Tuesday, February 28, 2017 11
  • 12. Our Branches & Divisions Tuesday, February 28, 2017 12
  • 13. Boson Techno Systems Pvt. Ltd. Sales Divisions Industrial Testing, Quality and Process Equipment Division Defense and Aerospace Division Semi-Conductor and Thin Film Coating Division Tuesday, February 28, 2017 13
  • 14. Semiconductor and Thin Film Coating Division Plasma Cleaner & Asher Systems Diener Electronic GmbH , Germany Tuesday, February 28, 2017 14
  • 15. Elettrorava - Italy Tuesday, February 28, 2017 15 THIN FILM DEPOSITION SYSTEM PECVD DEPOSITION SYSTEMS SPUTTERING DEPOSITION SYSTEMS ELECTRON BEAM DEPOSITION SYSTEMS ION BEAM DEPOSITION SYSTEMS HWCVD AND THERMAL EVAPORATION SYSTEMS MULTICHAMBER SYSTEMS THIN FILM DEPOSITION APPLICATIONS AUTOMATIC VACUUM AND DEPOSITION CONTROL
  • 16. Ultech Co. Ltd South Korea PLD-S Series (Spherical type Pulsed LASER deposition system) Application : Focusing the high power pulsed laser beam to strike a target Oxide compound deposition in oxygen atmosphere Ferromagnetic / Dielectric / magneto resistive material deposition Tuesday, February 28, 2017 16
  • 17. DRIE Series ( Deep Reactive Ion Etching system ) Application :- Bulk / Poly silicon etching (MEMS & NANO) Dielectrics etching (SiO2, Si3N4, etc.) Compound semiconductors etching Polyimide etching Tuesday, February 28, 2017 17
  • 18. Application : Silicon oxide deposition (Wet / Dry / Pyrogenic) Silicon nitride deposition Poly silicon deposition N-type doped poly silicon deposition Low temperature oxidation (LTO) BSG/ PSG / BPSG Oxy-nitride deposition Drive-in / Diffusion Anneal Tuesday, February 28, 2017 18 VLF Series ( Vertrical LPCVD/furnace system )
  • 19. SPACE Series ( ALD system) Application High-k gate dielectrics Diffusion barriers High-k dielectrics Passivation layers Transparent conductors Tuesday, February 28, 2017 19
  • 20. GRABO Series ( Grapnene/CNT/SiGe/SiC CVD system ) Application : Silicon nano wire growing Carbon nano tube CVD SiC epitaxy Tuesday, February 28, 2017 20
  • 21. UTS Series (Spin coater system ) Application : Photoresist(PR) coating for defining patterns in microcircuit fabrication Dielectric/insulating layers coating for microcircuit fabrication (polymers, SOG, Silk, etc.) Magnetic disk coating (magnetic particle suspensions, head lubricants, etc.) Flat screen display coating (anti-reflection, conductive oxide, etc.) Tuesday, February 28, 2017 21
  • 22. SPC Series(Spray Coater) Application : Photoresist(PR) or thin film coating Films coating for 3D structured pattern (V- groove, U-groove, Cavity, Channel, Other 3D Structure, etc.) Electroplating mold Sacrificial layer coating Electrical pattern connection Tuesday, February 28, 2017 22
  • 23. UTR Series ( Rapid Thermal process system ) Application Rapid thermal (anneal) process Thin gate oxidation (Nano device) Eutectic bonding (Reactive metal bonding) Silicide formation Silicide junction formation Tuesday, February 28, 2017 23
  • 24. WET BENCH SYSTEM Application Rapid thermal (anneal) process Thin gate oxidation (Nano device) Eutectic bonding (Reactive metal bonding) Silicide formation Silicide junction formation Tuesday, February 28, 2017 24
  • 25. Capres Applied Research Denmark Four Point Probe Resistivity Measurement System Tuesday, February 28, 2017 25
  • 27. Pattern Generator & Mask Inspection Tuesday, February 28, 2017 27
  • 28. Double Side Mask Aligner & Wafer Inspection Tuesday, February 28, 2017 28 Wafer Inspection System Mask Aligner System
  • 29. Planar Corporation Belarus Chip Preparation Equipment :Prober (provide the contact between probes and IC contact pads. ) Tuesday, February 28, 2017 29
  • 30. Wafer Grinder and Polishing System Tuesday, February 28, 2017 30 Wafer Grinder System Wafer Polishing System
  • 31. Semiautomatic Wafer Dicing Saw Tuesday, February 28, 2017 31
  • 32. Die Control and Cassetting Systems Tuesday, February 28, 2017 32
  • 37. CXsemi Company Limited Taiwan Surface Inspection System - Model No.: KLA-Tencor Surfscan 6420 Tuesday, February 28, 2017 37
  • 38. Film Thickness Measurement System Model no.: FilmChek AS150 Cxsemi Tuesday, February 28, 2017 38
  • 39. Optical Profiler - Optiphot 200 Tuesday, February 28, 2017 39
  • 40. UltraT Equipment USA Mask Cleaning System Tuesday, February 28, 2017 40
  • 41. Unitemp Germany Vaccum Reflow Soldering System RTA/RTP Ovens Tuesday, February 28, 2017 41
  • 42. JFP MICROTECHNIC France Semi-Automatic Wire Bonder - JFP Model WB100-1& WB200-2 Tuesday, February 28, 2017 42
  • 43. FRT GmbH Germany Non Contact Optical Surface Profiler Tuesday, February 28, 2017 43
  • 44. Linn High Therm GmbH - Germany RESISTANCE HEATING Batch Front loader Bottom loader / elevator Top loader Tube furnaces High pressure furnaces Laboratory furnaces Continuous Conveyor / belt Roller / Pusher furnaces Rotary hearth kilns Rotary tube furnaces Laboratory furnaces Tuesday, February 28, 2017 44
  • 45. Semicon Consumables Materials Sputtering Target Vinkarola Instruments -USA , Applied Science Korea , QRS material USA Photomasks HTA Photomask , Telic USA Silicon Wafer & SOI wafer SOITECH France , ICEMOS UK , PM Optics USA , LATECH Singapore , Micro Chemicals- Germany, Atecom Taiwan RF Cearamic Packages & Combo Lid for hybrid & Microwave Semiconductor Devices Metal life Korea , Materian USA Au Bonding wire & Ribbon , Al Bonding wire , Cu Bonding wire , Solder Alloy Atecom Taiwan Glass wafer For MEMS Wafer Plus Taiwan Photoresist ( Positive & Negative , E- beam resist) Microresist Germany Thin Film Substrate - MTI Corporation USA Laser Diode Bars & Chip DILAS Diodenlaser GmbH Germany ITO Coated Glass Plates, High Purity Evaporation materials Vin Karola Instruments GaN Template , EPI wafer Kyma Technologies USA SiC Wafer, GaN Wafer, GaAs Wafer, Germanium Wafer, Gallium nitirde wafer, epi wafer, GaN epi wafer, epitaxial wafer, InGaAs epitaxial wafer, GaN epitaxial wafer, LT-GaAs - Xiamen Powerway Advanced Material Co.,Ltd. - China Tuesday, February 28, 2017 45
  • 47. Defence Research & Development Organisation Central Electronics Engineering Research Institute Tuesday, February 28, 2017 47