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Automatic Nanoimprint
Replication System for
Roll-to-Roll
Nanofabrication process
Authors of the presentation:
Henrik Lindskov,Yan Xia (DPL Industri A/S Denmark)
What is
Nanofabrication
Process?
NanofabricationNanosicents
Semiconductor
Laboratory Mass Production
Printed Electronics
SmartTV Smart Label Solar Energy
Why you need
Nanostructure
Replication
System ?
Nanostructure
Replication
System
Nanostructure Master
Roll-to-Roll Nanofabrication
Shim roller on
Micro-
Embosser for
Holographic
Film
Shim roller
What is Nanostructure Mastering?
RD E-BEAM MADE
ds are provided on 20x20mm Si substrates.
gh-resolution and large enough area of
affordable price. These templates are normally
hipment.
2
development
growth
structures
ayers, photovoltaic patterning
PRINT TEMPLATES
ce
Area Feature Diameter / Height
Layout of the standard ebeam-made molds
5 mm
20 mm
res
Creating nanostructure on the object by Lithography System: E-beam,
Laser, UV..
and services
nd laser interference
orking stamps
ng, Roll-2-Roll printing, and injection moulding
bossing, EBL, DUV)
typing, one-off devices, and small series
What is the
problem in the
market now?
Visible Joints between the unit plates
through microscope
How Does Nanoimprint Replication SystemWork?
DPL
Automatic
Replication
System
Die Head Workbench Integrated PLC
Control system
What is DPL
Know-how
Die Head Die Head
PDMS
template
Inside LED
Light source
Air chilling
Automatic
Pressure
Control
How does it
work?
How Does ItWork?
OurObjectives:
Replication line
+/- 25mic
Position accuracy
+/- 25mic UV Nanoimprint Replication Sample
Through Microscope
Feature 1:
High-Solution
Replication
UV Imprint with polymer stamps (2:2)
Master Working Stamp Substrate
Optical
Microscope
100x
AFM
 Master depth is 514 nm, imprint depth is 503 nm.
 Perfect master to substrate replication
Feature 2:
High Precision
Positional
Movement
Position Error:
+/- 0.025mm
Position Error:
+/- 0.025mm
Feature 3:
Integrated
Control
System
Position Control
Integrated PLC
Control System UV Energy Control
Pressure Control
Speed Control
Self-Correction
Why DPL?
15
Experienced
engineering design
The oldest UV system
manufacture in Europe
Pattern owner of
cold UV technology
Innovator of LED
module designer
DPL
OurActivities
&Work
Packages
16
PDMA Stamp
LED Module
Radiation and
DOSIS testing
Air-chilling
system
WP1: Die Head
Design
WP2:Workbench
Design
WP3:Integrated
System Design
Glass Plate
Linear Motion
System
Porotype
installation
Position Control
UV Energy
Control
Pressure Control
Programing PLC
UV EnergyTest ReplicationTest
Nanoimprint Replication
17
Director
Technical Dept. Project Manager Marketing Dept.
Leader of
WP1,WP2,WP3
Regulatory risk
assessment and
testing
Hold communication
meeting
Settlement of disputes
etc.
Business Plan
Project Management
Marketing
Strategy:We
are not only
searching
potential
demand but
also creating
new demand.
18
Marketing
Workshop
Optimization
Production
Cost
Project
Website
Exhibition
Conference
Product
Strategy
19
Laboratory
Mass
Production
Security Printing
Optical Film
DPL Current Sales
Network
Competitive
Analysis
20
Weakness
Existing Products lose market in the face
of competition from the low-priced
products from the low labor area
Strengths
Opportunities
Creativity & Innovative
Experienced technical team
High-quality control system
Develop high-technology products for
emerging industries with insufficient
supply
Company
Culture
Innovation is not just a dream of
young people.
21
Thanks

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DPL Large scope nano-replication system -www.dpl.dk