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ECE692_1_1208.I hope helpful everyone this ppt
- 1. ECE 692 (to be ECE 635) Advanced Semiconductor Devices Gong Gu Course website: http://web.eecs.utk.edu/~ggu1/files/GradHome.html Fall 2012
- 2. Why Semiconductors? Information acquisition (sensors) Image, sound, temperature, pressure, ¡ Information processing (Amps, A/D, processors, tranceivers¡) Information processing (tranceivers, processors, ¡) Displays Information transmission (wires, busses, cables, optical fibers, or just air!) ? Brains and muscles of the system are made of semiconductors ? Metals & dielectrics are used as transmission media ? Why? Image, sound, temperature, pressure, ¡
- 3. What¡¯s common for all the core components? Light, sound, temperature, pressure, ¡ sensor Voltage, current input output ?A Vin Vin Vin Vout Vout Vin Vout Modulation of some physical quantity (output) by some others Some kind of gain, conversion ratio, sensitivity, etc
- 4. Example: Field-Effect Transistors (FETs) Semiconductor vs Metal Vin Vout Vin Vout FET¡¯s are building blocks. S D G Schematic illustration of a FET For SiO2 dielectric, breakdown field Eb ~ 107 V/cm. No matter how thick it is, the maximum induced carrier area density is ?r?0Eb/q = 2 ¡Á 1013 /cm2. For a 1 ?m thick Si channel, ni = 1.45 ¡Á 1010 /cm3, the background carrier area density is ni ¡Á 10?4 cm = 1.45 ¡Á 106 /cm2. In principle, the area carrier density, and therefore the channel conductance, can be modulated by 7 orders of mag!!! For Al, n = 1.8 ¡Á 1023 /cm3. Even for 1 nm thin (monolayers!) Al, the background carrier area density is 1.8 ¡Á 1016 /cm2. The conductance can only be modulated by 0.1%!!! What are semiconductors, anyway???
- 5. A Digression: The Vast Field of Electrical Engineering ? Different disciplines are different levels of extraction ? Device engineers are at the junction of many disciplines ? Follow your passion Solid- state physics Device physics circuits Transistor level Higher level Information theory Control theory chemistry Semiconductor physics Materials science Semiconductor processing Economics Core knowledge body of the device engineer
- 6. A Digression: The Vast Field of Electrical Engineering ? But, each small field can consume one¡¯s entire life ? So, how can one be a good device engineer??? Chuang Tzu: My life is limited while knowledge is unlimited. Pursuing the unlimited with the limited, it is just hopeless! Çf×Ó£º ÎáÉúÒ²ÓÐÑÄ ¶øÖªÒ²ŸoÑÄ ÒÔÓÐÑÄÖðŸoÑÄ ´ùÒÓ Solid- state physics Device physics circuits Transistor level Higher level Information theory Control theory chemistry Semiconductor physics Materials science Semiconductor processing Economics Core knowledge body of the device engineer
- 7. A Digression: The Vast Field of Electrical Engineering Solid- state physics Device physics circuits Transistor level Higher level Information theory Control theory chemistry Semiconductor physics Materials science Semiconductor processing Economics Core knowledge body of the device engineer How can one be a good device engineer??? The big picture! This course is about the big picture. It willed be tailored to suit your research interest; we have a small class after all.
- 8. Let¡¯s get to know each other! ? Name, year ? Previous exposure to quantum mechanics, solid-state physics, device physics, processing, ckt design (courses + hands-on) ? Advisor ? Research field, particular topic ? Like it? Class meeting schedule?
- 9. Syllabus Course Objective: To provide students with an understanding of device physics and advanced semiconductor device concepts. Topics ? Review of Semiconductor physics - Crystal structure, band structures, band structure modification by alloys, heterostructures, and strain - Carrier statistics - Scattering, defects, phonons, mobility, transport in heterostructures ? Device concepts - MOSFETs, MESFETs, MODFETs, TFTs - Heterojunction bipolar transistors (HBTs) - Semiconductor processing - Photodiodes, LEDs, semiconductor lasers - (optional) resonant tunneling devices, quantum interference devices, single electron transistors, quantum dot computing, ... - Introduction to nanoelectronics
- 10. Syllabus (Cont¡¯d) Reference books ? Jasprit Singh, Physics of Semiconductors and Their Heterostructurs Reads like somebody¡¯s notes. May not be the most elegant or strict from a physics point of view, but definitely serves semiconductor folks well. Intriguing and stimulating. ? Jasprit Singh, Semiconductor Devices:Basic Principles Book by the same author on Devices but including semiconductor physics & processing. ? U. K. Mishra & J. Singh, Semiconductor Device Physics and Design E-book available on line thru UT Lib. ? Karl Hess, Advanced Theory of Semiconductor Devices Thin, but covers lots of stuff at advanced levels ? Ben Streetman, Solid State Electronic Devices From basic physics to device concepts. Oldie goodie. ? S. M. Sze (Ê©Ãô), Physics of Semiconductor Devices The ¡°Bible¡± of device engineers. Not for beginners. Keep it in mind or on your shelf; an excellent reference book for your future career. ? R. S. Muller & T. I. Kamins, Device Electronics for Integrated Circuits An undergrad textbook on Si microelectronics, but good to have. I go back to it quite often. ? J. D. Plummer, M. D. Deal, P. B. Griffin, Silicon VLSI technology: fundamentals, practice and modeling Best textbook on processing, by the people who developed many of the models.
- 11. Syllabus (Cont¡¯d) Journals ? IEEE Electron Device Letters ? IEEE Transactions on Electron Devices ? Applied Physics Letters ? Journal of Applied Physics Websites ? Wikipedia (Are you kidding? No!) ? Ioffe Physico-Technical Institute http://www.ioffe.ru/SVA/NSM/ http://www.ioffe.ru/SVA/NSM/Semicond/index.html Physical properties of many semiconductors.
- 12. Syllabus (Cont¡¯d: The Tough Part) Evaluation ? Classroom participation, performance (15%) ? Homework / Mini projects ¨C simple (20%) ? Term project: Review of a selected specific area, oral presentation on the topic of the paper, oral exam (65%) The topic may or may not be closely related to your research, but cannot be your research topic per se. Need my okay on the topic before it¡¯s too late. ? The good news: It¡¯s not that tough - ¡ - The population is too small. Any distribution does not have any statistical meaning. Which means, you could all get A¡¯s. On the other hand, you could ¡
- 13. Back to Business What are semiconductors, anyway??? Long way to go to answer this question. What answers do you have now?
- 14. Review of Semiconductor Physics Quantum mechanics ? Shr?dinger equation The equation that scared Einstein ? Stationary states ? Special case: free space ? E-k dispersion: light wave vs de Broglie wave ? The concept of eigenstates ? Wave packets ? The uncertainty principle