Sheet Resistance Mapping of Functional Thin-Film by EddyCus TF map 4040SR
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The eddycus? tf map 4040sr is a user-friendly system designed for rapid mapping of sheet resistance in various materials, including thin films on glass and wafers. It features customizable parameters and non-contact eddy current sensors, allowing for high spatial resolution and quick evaluations of resistive and dielectric properties. The device offers multiple scanning dimensions, accuracy levels, and built-in software for easy configuration and data analysis.
Sheet Resistance Mapping of Functional Thin-Film by EddyCus TF map 4040SR
- 1. DATA SHEET - EddyCus? TF map 4040SR Sheet Resistance Mapper The EddyCus? TF map 4040SR is a for system for fast mapping of sheet specific applications. If required, the resistance or layer thickness of various system comes with adapted parameter conductive materials. The system allows sets for defining the scan area for each a impedance tested material. The system is easy to spectroscopy for high spatial resolution handle and supported by user-friendly mapping of resistive and dielectric software for fast real-time evaluation. properties. conduct The device comes with pre-configured significantly parameter sets for different testing applications tasks. Hence users can quickly obtain fast, user-friendly It enables measurements, which expands its field of to various material sheet of thicker thin-film on glass, wafer and foils. The device uses sensors sets with SURAGUS GmbH Maria-Reiche-Str. 1 01109 Dresden Germany E-Mail: info@suragus.com Phone: +49 (0) 351 273 598 01 Fax: +49 (0) 351 329 920 58 www.suragus.com www.sheet-resistance-measurement.com Testing of conductive layers. without specific knowledge on the technology. sensitivities and spatial resolutions, which could be customized mapping and allowing to monitor quality parameters different resistance systems results Certified ISO 9001
- 2. DATA SHEET EddyCus? TF map 4040SR ¨C Sheet Resistance Mapper EddyCus? TF map 4040SR Sheet resistance measurement Substrate thickness measurement Scanning area Non-contact eddy current sensor On request 400 x 400 mm? Max Sample thickness (defines distances) 5 / 15 / 25 / 45 / 60 (defined by the thickest sample) Sheet resistance range 0.001 ¨C 10 Ohm/sq < 2 % accuracy 10 ¨C 100 Ohm/sq < 3 % accuracy 100 ¨C 1,000 Ohm/sq < 5 % accuracy Scanning time @ 1mm measurement pitch 100 x 100 mm? less than 3 minutes 200 x 200 mm? less than 5 minutes 400 x 400 mm? less than 15 minutes Thickness measurement of thin-films (e.g. cooper) In accordance with sheet resistance Sample rate 3,000 samples per second Scanning Speed 200 mm /s Scanning pitch 0,025 ¨C 2,5 mm Device dimension Height of work area Weight 750 / 1,090 / 1,140 mm (w/h/d) 780 mm 65 kg SHEET RESISTANCE ANALYZER ? Easy to use software for configuration and data review ? Graphical display of mapping ? Review of histograms ? Comprehensive tools perform details data analysis ? Various export functions ? Evaluation with color coding ? Extensive filtering capabilities SURAGUS GmbH | Maria-Reiche-Str. 1 | D-01109 Dresden | Germany | Phone +49 351 273 598 - 01 | Fax + 49 351 329 920 - 58 | info@suragus.com | www.suragus.com