MEMS final techfest
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MEMS (Micro-Electro-Mechanical Systems) are microfabricated structures that have both electrical and mechanical components and functionality. The document discusses how MEMS can be used in accelerometers, gyroscopes, hard drive read/write heads to enable faster actuation and finer positioning. It also outlines fabrication processes for MEMS like surface micro machining and LIGA and provides examples of MEMS applications in data storage, concluding that MEMS will transform lives by improving comfort.
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Since the 1980s microelectromechanical systems (MEMS) based devices have been manufactured primarily on round silicon (Si) substrates. This has been accomplished by primarily riding the coattails of the semiconductor (SEMI) integrated circuit chip industry, where Si substrate diameters have grown from less than 50 mm to 300 mm. As new larger diameter fabrication equipment was needed the previous generation tools (refurbished) were adopted by the MEMS industry at much lower price points.
Today, the SEMI industry has stalled at 300 mm, likewise the MEMS industry is mired at 200 mm diameter. The issue is that many MEMS chip dimensions can be large, greater than 10 x 10 mm^2 in area and can have expensive wafer-level packaging (WLP) utilized to protect its moving parts from inexpensive plastic molded packaging. When considering the $1 per mm^2 rule of thumb for unyielded chip production cost, these Big MEMS chips are very difficult to fabricate cost effectively for their accompanying product market adoption.
Meanwhile over the last two decades of flat panel display (FPD) technology requirements have continued to increase in complexity and manufacturing capabilities. This includes increasing FPD resolution from todays 4K to 8K and glass substrate size up to 3.1 x 3.1 m^2, a.k.a. Generation 10 (Gen 10 or G10) glass. To achieve these challenging levels many manufacturing obstacles have had to be overcome, such as magnetron sputtering over large areas, including deposition thickness uniformity and optical property uniformity, the reduction of yield detractors, such as particles generated due to plasma arcing, and other process challenges.
What if the MEMS/sensor industry wasnt restricted in substrate size, such as by utilizing G8 (2.1 x 2.4 m^2) or older (smaller area) fabrication equipment? Then, the chip cost could dramatically decrease.Mems for space seminar presentation
Mems for space seminar presentationhanuman dhayal
油
Micro-Electro-Mechanical Systems, or MEMS, is a technology that in its most general form can be defined as miniaturized mechanical and electro-mechanical elements (i.e., devices and structures) that are made using the techniques of microfabrication. The critical physical dimensions of MEMS devices can vary from well below one micron on the lower end of the dimensional spectrum, all the way to several millimeters. Likewise, the types of MEMS devices can vary from relatively simple structures having no moving elements, to extremely complex electromechanical systems with multiple moving elements under the control of integrated microelectronics. The one main criterion of MEMS is that there are at least some elements having some sort of mechanical functionality whether or not these elements can move. In other words Microsystems are miniaturized integrated systems in a small package or more specifically, micro-sized components working together as a system and assembled into a package that fits on a pinhead. In the United States, these devices are referred to as microelectromechanical systems or MEMS. European countries referred to such devices as microsystems or MST. These two terms MEMS and MST are often used interchangeably. Microsystems are microscopic, integrated, self-aware, stand-alone products that can sense, think, communicate and act. Some systems can do all of these things, plus scavenge for power.Mems based hand gesture controlled robot
Mems based hand gesture controlled robotSriteja Rst
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Hand Gesture Controlled Robto USing MEMS.
MEMS is a Micro Electro Mechanical Sensor siply said as Motion sensorMems unit 1 ppt
Mems unit 1 pptNithyaS71
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This document provides an introduction to microelectromechanical systems (MEMS). It defines MEMS as systems that combine electrical and mechanical components on the micrometer scale to sense and control the physical world. MEMS components include microsensors to detect environmental changes, an intelligent component to make decisions based on sensor input, and microactuators to change the environment based on the decisions. Common MEMS applications include accelerometers, inkjet printer heads, medical devices, and sensors in automobiles. The document discusses fabrication techniques like deposition, patterning, and etching used to create MEMS, as well as their advantages like low cost, small size, and high functionality.Millepede- MEMS based memory device from IBM
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The document summarizes Millipede memory, a non-volatile computer memory device developed by IBM with a data density over 1 terabit per square inch. It uses a 2D array of micro-mechanical silicon probes to store data as nanoscopic pits burned into a polymer substrate. Each probe can read or write data individually in a parallel manner to achieve high data rates. While offering high density storage, Millipede memory also allows low power operation but has limitations in rewrite cycles and costs. Further research focuses on improving writing, reading and error correction methods to increase storage capacity beyond 1 terabit per square inch.MEMS-unit1A.pptx
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This document discusses microelectromechanical systems (MEMS) and their applications. MEMS devices can be the size of a rice grain or smaller. There is increasing demand for intelligent, robust, multi-functional, and low-cost industrial products, which miniaturization can satisfy. MEMS have various applications including sensors, actuators, and integrated microsystems. Examples of MEMS applications discussed are airbag sensors in cars, medical devices like pressure sensors, and microoptical components. The document outlines the multidisciplinary nature and evolution of MEMS technology.Micro_Electro_mechanical_system
Micro_Electro_mechanical_systemabhijithpm4
油
Micro-Electro-Mechanical Systems, or MEMS, is a technology that in its most general form can be defined as miniaturized mechanical and electro-mechanical elements (i.e., devices and structures) that are made using the techniques of microfabrication. The critical physical dimensions of MEMS devices can vary from well below one micron on the lower end of the dimensional spectrum, all the way to several millimeters. Likewise, the types of MEMS devices can vary from relatively simple structures having no moving elements, to extremely complex electromechanical systems with multiple moving elements under the control of integrated microelectronics. The one main criterion of MEMS is that there are at least some elements having some sort of mechanical functionality whether or not these elements can move. The term used to define MEMS varies in different parts of the world. In the United States they are predominantly called MEMS, while in some other parts of the world they are called Microsystems Technology or micromachined devices.SMART DUST
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Smart dust is a network of tiny sensor-enabled devices called motes that can monitor environmental conditions. Each mote contains sensors, computing power, wireless communication, and an autonomous power supply within a volume of a few millimeters. They communicate with each other and a base station using radio frequency or optical transmission. Major challenges in developing smart dust include fitting all components into a small size while minimizing energy usage. Potential applications include environmental monitoring, healthcare, security, and traffic monitoring.1_Introduction_MEMS_&_Microsystems.pdf .
1_Introduction_MEMS_&_Microsystems.pdf .Athar739197
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The document provides an introduction to micro-electromechanical systems (MEMS) and microsystems. It defines MEMS as the integration of mechanical elements, sensors, actuators and electronics on a common silicon substrate through microfabrication. MEMS combine mechanical and electrical components to sense, control and actuate on a micro scale but generate effects on a macro scale. Typical MEMS products include microgears, micromotors, microturbines and micro-optical components. The document also discusses applications of microsystems in various industries such as automotive, healthcare, aerospace, industrial products and consumer products.MEMS based gesture controlled robot
MEMS based gesture controlled robotSomanchi Aditya
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This project involves controlling a robot wirelessly using hand gestures detected by a MEMS sensor. The MEMS sensor detects acceleration from hand movements and sends analog signals to a microcontroller. The microcontroller converts the signals to digital data and sends it to a motor driver. The motor driver moves the robot motors forward or backward based on the hand movement detected, allowing wireless control of the robot through hand gestures up to 1.6 km away. This technology could help modernize control of future technologies and assist people with physical challenges.Millipede memory
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Millipede memory is a non-volatile computer memory stored on nanoscopic pits burned into the surface of a thin polymer layer, read and written by a MEMS-based probe. It promised a data density of more than 1 terabit per square inch (1 gigabit per square millimeter), which is about the limit of the perpendicular recording hard drives. Millipede storage technology was pursued as a potential replacement for magnetic recording in hard drives, at the same time reducing the form-factor to that of flash media.Smart dust
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Smart dust is a network of tiny sensor motes that can detect environmental conditions like light and vibrations. Each mote contains sensors and computational ability to communicate wirelessly with other motes or a base station. Though constrained by their small size, the motes conserve power by powering on intermittently to perform tasks then powering off. Potential applications include environmental monitoring and situations where wired sensors are impractical. While smart dust enables connectivity and low costs, privacy concerns and challenges around power management and self-maintenance exist. However, companies are investing in the technology to integrate it into future systems and networks.microelectromechanicalsystem-211119004654.pdf
microelectromechanicalsystem-211119004654.pdfBarsena
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MEMS are miniature devices that combine electrical and mechanical components on a chip. They are fabricated using deposition, patterning, and etching processes. Common MEMS components include sensors, actuators, and microstructures. MEMS offer advantages like lower power consumption, higher sensitivity, and lower cost compared to larger devices. They have applications in automotive, healthcare, aerospace, and telecommunications industries.Micro electro mechanical system (MEMS)
Micro electro mechanical system (MEMS)Mirza Baig
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What is MEMS?
Micro electro mechanical system is a technique of combining electrical and mechanical combinations together on a chip, to produce a system of miniature dimensions.
MEMS is a integration of a number micro components on a single chip which allow the microsystem to both sense and control the environment.
The components are integrated on a single chip using micro fabrication technologies.
EEE-BEE026- Micro Eelectro Mechanical Systems- Mr. K. Dwarakesh.K.pdf
EEE-BEE026- Micro Eelectro Mechanical Systems- Mr. K. Dwarakesh.K.pdfNagendraKumar749944
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MEMS (micro-electromechanical systems) is the technology of microscopic devices incorporating both electronic and moving parts. MEMS are made up of components between 1 and 100 micrometres in size (i.e., 0.001 to 0.1 mm), and MEMS devices generally range in size from 20 micrometres to a millimetre (i.e., 0.02 to 1.0 mm), although components arranged in arrays (e.g., digital micromirror devices) can be more than 1000 mm2.[1] They usually consist of a central unit that processes data (an integrated circuit chip such as microprocessor) and several components that interact with the surroundings (such as microsensors).[2].
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For other uses, see MEMS (disambiguation).
MEMS (micro-electromechanical systems) is the technology of microscopic devices incorporating both electronic and moving parts. MEMS are made up of components between 1 and 100 micrometres in size (i.e., 0.001 to 0.1 mm), and MEMS devices generally range in size from 20 micrometres to a millimetre (i.e., 0.02 to 1.0 mm), although components arranged in arrays (e.g., digital micromirror devices) can be more than 1000 mm2.[1] They usually consist of a central unit that processes data (an integrated circuit chip such as microprocessor) and several components that interact with the surroundings (such as microsensors).[2]
MEMS microcantilever resonating inside a scanning electron microscope
Proposal submitted to DARPA in 1986 first introducing the term "microelectromechanical systems"
Because of the large surface area to volume ratio of MEMS, forces produced by ambient electromagnetism (e.g., electrostatic charges and magnetic moments), and fluid dynamics (e.g., surface tension and viscosity) are more important design considerations than with larger scale mechanical devices. MEMS technology is distinguished from molecular nanotechnology or molecular electronics in that the latter two must also consider surface chemistry.
The potential of very small machines was appreciated before the technology existed that could make them (see, for example, Richard Feynman's famous 1959 lecture There's Plenty of Room at the Bottom). MEMS became practical once they could be fabricated using modified semiconductor device fabrication technologies, normally used to make electronics.[3] These include molding and plating, wet etching (KOH, TMAH) and dry etching (RIE and DRIE), electrical discharge machining (EDM), and other technologies capable of manufacturing small devices.
They merge at the nanoscale into nanoelectromechanical systems (NEMS) and nanotechnology.
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For other uses,Micro-electro-mechanical Systems 
Micro-electro-mechanical Systems utpal sarkar
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Micro-electro-mechanical systems (MEMS) are tiny devices that convert electrical energy to mechanical motion and vice versa. There are three key steps to fabricating MEMS: deposition of thin films, patterning of the films, and etching to remove unwanted material. MEMS are commonly used in sensors and actuators due to their small size, low power consumption, and ability to integrate electronics and mechanical elements on a single chip. Common applications include accelerometers in smartphones, pressure sensors in cars, and medical devices.Mems
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The document provides information about various topics including MEMS, NC machines, and CNC machines. It discusses:
1) MEMS involves integrating microsensors, microactuators, and microelectronics on a silicon chip to sense and react to the environment. Fabrication methods for MEMS like bulk micromachining and surface micromachining are also described.
2) NC machines have programs fed via tape while CNC machines are interfaced with computers, allowing for easier programming changes.
3) CNC machines evolved from early NC machines which were modified machine tools. CNC machines have computer control, memory storage, and closed-loop feedback to provide high accuracy and repeatability for machining.Abstract18
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The document discusses a VLSI design based three phase power converter gating system. It notes that conventional gating circuits for three phase converters have issues with delays, power consumption, and layout complexity due to operating at high frequencies. The proposed system offers advantages over analog systems such as no temperature drift, reduced component count, smaller size, fewer connections, and software-based tuning.Mobile Device-Architecture
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MEMS = Micro Electro Mechanical System
Any engineering system that performs electrical (switching ,deciding) and mechanical functions (sensing,moving,heating) with components in micrometers is a MEMS. More from Akhil Garg (6)
video surveilance system
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This document provides a case study of a video surveillance system implemented at VVDN Technologies Pvt. Ltd. It begins with an introduction to video surveillance systems and their benefits. It then discusses emerging trends in video surveillance technology, including applications in fire detection, traffic monitoring, intrusion detection, and more. The document also examines network camera components and connectivity options for video surveillance systems. Finally, it provides a description of a specific video surveillance system installed at a site called "Macawer Beekay", outlining the solution components and technical details.Embedded Systems Training Report
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Gesture Recognition Techniques, Leap Motion Sensor: Taking leap to control anything in a real human manner unlike traditional artificial taps and clicks , Sviacam, Eviacam, moves the mouse pointer as you move your Head.MEMS final techfest
- 2. Micro - Small size, micro fabricated structures Electro - Electrical signal /control ( In / Out ) Mechanical - Mechanical functionality ( In / Out ) Systems - Structures, Devices, Systems Control
- 6. Accelerometer & Gyro Sensors
- 7. iMEMS ADXRS Angular Rate-Sensing Gyro
- 8. Hard Drive Magnetic Read/Write Heads By incorporating MEMS actuation, the head can be positioned more quickly and to finer tolerances, thi results in higher density data capability.
- 11. Surface Micro Machined Motor
- 13. HARMEMS
- 14. LIGA Fabrication Process microstructures up to 1000 亮m high.
- 18. Mass Storage - IBM IBMs Millipede 100 Tera Bit per square inch!
- 19. CONCLUSION MEMS would completely transform our lives and improve our comfort level tremendously
- 20. Thank You
- 21. QUERIES