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Hybrid TDI Cameras Technology
1/ HYBRID TDI CAMERAS TECHNOLOGY
2/ VIEWORKS TDI CAMERAS
3/ TECHNICAL FEATURES
4/ APPLICATIONS
5/ COMPARISONS
Index
1/ HYBRID TDI CAMERAS TECHNOLOGY
Time Delay and Integration (TDI)
4
 Sensor design that uses multiple line scan stages (up to 512)
 Captures an image of a moving object while transferring integrated signal charges synchronously line
by line with the objects movement
 The collected signal increases by a factor equivalent to the number of TDI stages or transfers
Sensitivity (TDI Stage)
32
Stages
128
Stages
256
Stages
512
Stages
 Line Rate 34 KHz  300 KHz
 Resolution 4k  8k  12k  18k  23k
 Pixel Size 14  10  7  5  3.5 
TDI Sensor Concept
5
Time 1
Signal Transfer
Object Move
Time 2 Time 3
Charge
TDI Sensor Concept
6
 Single Line Image vs 256 TDI Image
SNR 5.9 SNR 73.1
16K Line Scan Image 18K 256 Stage TDI Image
TDI Sensor Concept
7
 Built-in ADC
 Digital Output
 Higher Noise
 Lower Power Consumption
 Faster Speed
Accumulating the signal electronically, increasing sensitivity
Conventional CMOS TDI Sensor
 Features of CMOS TDI Linear Sensor
8
 Noiseless charge transfer & accumulation
 Features of CCD TDI Linear Sensor
 Complex additional external circuitry
(ADC, H-Driver, Vertical Driver, CCD Amp etc.)
 High signal-to-noise ratio
 High power consumption
 Analog Output
Conventional CCD TDI Sensor
High Speed
9
(Advantage of CCD)
High Sensitivity
(Advantage of CMOS)
+
Vieworks Hybrid TDI
Hybrid TDI Sensor Technology
10
Hybrid TDI Sensor Technology
 Combine Advantage of CCD and CMOS

Out
Memory Buffer
Transfer Signal
CCD Structure
+
Data Readout
CMOS Structure
High Speed Digital Output
CMOS Structure
11
Hybrid TDI Sensor Technology
 Features of Hybrid TDI Linear Sensor
 CCD + CMOS Structure
 Combines a light sensitivity CCD-based
TDI pixel array with CMOS readout electronics
 CCD pixel structure delivers
low-noise, high dynamic range
 CMOS technology enables
low-power consumption, fast readouts
12
 Better Sensitivity
 Higher Dynamic Range
 Lower Power Consumption
 Higher Speed
Hybrid TDI Sensor Technology Advantages
 Combination of best features of CCD and CMOS
2/ VIEWORKS TDI CAMERAS
14
Vieworks Hybrid TDI Camera Lineup
15
M95 mount
VT-16K5X-H140
VT-23K3.5X-H100
M42 mount
VT-3K7C-E100
VT-3K7C-H100
VT-4K5C-E100
VT-4K5C-H100
VT-6K3.5C-E100
VT-6K3.5C-H100
VT-3K7X-E250
VT-3K7X-H250
VT-4K5X-E200
VT-4K5X-H200
VT-6K3.5X-E160
VT-6K3.5X-H160
VT-4K7C-H120
M72 mount
VT-4K14C-H120
VT-9K7C-H80
VT-12K5C-H60
VT-18K3.5C-H40
VT-6K10X-H170
VT-9K7X-H120
VT-9K7X-H250
VT-12K5X-H100
VT-12K5X-H200
VT-18K3.5X-H80
VT-18K3.5X-H140
Vieworks Hybrid TDI Camera Lineup
16
 Supporting M42 / F mounts
 Dimension: 60   60   36 
 Cost effective
 Up to 256 TDI stages
 Microscopy
 Compact size and design
 Dedicated strobe controller (optional)
[Mechanical Dimension in ]
Vieworks Hybrid TDI Camera Lineup
VTDI - M42 Mount
17
 M72: 90   90   43 
 M95: 100   100   42 
M72
 High Quality & High Performance
 Up to 256 TDI Stages
M95
Vieworks Hybrid TDI Camera Lineup
VTDI - M72 & M95 Mount
18
 Two Images at once
 High Sensitivity
VT-DI Series
Dual Imaging Hybrid TDI
Vieworks Next Generation TDI
19
Dark Field (Specializing for Defect)
Bright Field (General)
VT- DI Dual Imaging Hybrid TDI
Acquiring two different images at once!
20
1) Use 2 cameras
orOR
2) Inspect 2 times
VT- DI Dual Imaging Hybrid TDI
If you want to get two different images
If you use Dual Imaging TDI
Acquiring two images at once!
21
Costs
Saving
Time
Reducing
Detection Rates
Increasing
VT- DI Dual Imaging Hybrid TDI
3/ TECHNICAL FEATURES
23
 8/10/12 bit Pixel Format
VT Series Technical Features_ Summary
 Programmable TDI Stage Count (256 /192 /128 / 64 / 32)
 Advanced PRNU, DSNU Correction
 Pre-emphasis Output for Camera-Link (10m cable @ 85MHz)
 Bi-direction Scanning
 Coax-Express Interface(4 CH, 25Gbps)
 Area Scan Mode for Camera Alignment
 Built-in Trigger Sync Converter
 Built-in Programmable Strobe control
 X2 Binning(H & V), ROI, Horizontal Flip, LUT Function
 Area Scan mode for camera alignment
24
Area Mode
Area Mode Output Image
300% Image
 Correct Encoder Trigger Input
25
Trigger Rescaler Function
 WDR, Gamma, Histogram Preprocessing
26
LUT Function
 Support Multi-Link Functions (1 : 2 output Functions)
27
 Euresys DF board Solution: 4 channel bandwidth and Data forwarding
 When required 2 PCs per 1 Camera for faster processing
Multi Link
Master PC Slave PC
Image Streaming
Camera Control
Image Streaming
28
Strobe Output Control
 Strobe Output Control for Exposure Changing
29
Strobe Output Control
 Strobe Output Control for Exposure Changing
Output level differs depending on line speed Output level is constant
Image output at motion changes
[Continuous illumination] [Strobe illumination]
30
 Current Controller
 High efficiency
 Fast response speed (1イ)
 No need of shunt resistance
 Up to 2A DC current (Max. pulse 10A)
M42 TDI Line Scan + Strobe Controller + LED
Strobe Output Control
 Strobe Controller Module for M42 TDI
31
Supporting Multiple Strobes by Combining SCMs
Strobe Output Control
 Strobe Controller Module for M42 TDI
 Universal LED Strobe Controller
32
Model VLS-PS-40W VLS-PS-150W
Current
DC (0  2 A)
Pulse (0  20 A)
DC (0  5A)
Pulse (0  25A)
Max.Frequency 300 KHz 300 KHz
Min.CurrentPulseWidth 1 us 1 us
StrobeDelay 0.5 us 0.5 us
LEDVoltage Auto (Max 70V) Auto (Max 48V)
LEDPower
DC 30 W
(Pulse 1000W)
DC 150 W
(Pulse 1000W)
Strobe Output Control
4/ APPLICATIONS
34
 Applications where it is desired to record a linear movement
 Applications which operate under low brightness, requiring high-resolution
 in-line applications requiring high-speed operation with high sensitivity
 High-speed imaging for low light applications i.e. fluorescence imaging
 Semiconductor inspection
 Electronics manufacturing and inspection
 Letter and film scanning
 High-speed scanning for large size samples i.e. flat panel displays
 Continuous imaging of high-speed moving object i.e. satellite imaging
 Fast automatic sorting of letters and parcels
 Glass sorting with glass recycling applications
 Web Inspections
Applications
 TDI Cameras are useful for
35
Applications
5/ COMPARISIONS
37
Specifications VT-12K Comparison TDI
SensorType Hybird (CCD + CMOS) CCD
Resolution 12480  256 12000  256
PixelSize 5.0   5.0  5.2   5.2 
Responsivity(nJ/) 550 DN (@620 ) 300 DN (@500 )
SaturationCapacity 40 Ke- 24 Ke-
DarkNoise
23 e-
13 e- (@ Analog Gain 4)
33 e-
DynamicRange 64  57 
Max.LineRate 100  90.8 
Max.LineRate@2Binning 100  82 
TriggerInterface CoaXPress / External LVDS (Camera Control Port)
CameraInterface CoaXPress HSLink
GrabberCompatibility
Euresys, Kaya, Silicon Software,
Active Silicon, Matrox
Dalsa (Xcelera-HS)
PowerConsumption
9 W
(PoCXP Compliant  No need for external power supplies)
36 W
(An external power supply is required)
Max.CableLength 40 m (CXP6  2 cables) 10 m (HSLink  1 cable)
MechanicalDimension 90   90   38  180   90   92.1 
Comparisons of 2 TDI cameras (12K)
38
Responsivity
(VT-12K vs. others)
VT-12K 256 Stage
CCD 256 Stage
1 Line
4 Line
Wavelength (nm)
Responsivity
(DN/nJ/cm^2)
380 460 525 640 740 850 940
Responsivity
 VT-12K has better responsivity at overall wavelength
39
Responsivity
 VT-12K has better responsivity at all the colors
39
Responsivity
Responsivity
 Measures the inputoutput gain of a detector system
 In the specific case of a photodetector,
responsivity measures the electrical output per optical input
Comparison TDI
40
Comparison TDI
Shot Noise
 VT-12K has less shot noise
41
* Test Condition: 5500K White Lighting / 8-bit pixel format / 200 target level
Image
Model Comparison TDI
Standard
Deviation
1.6 DN 2.0 DN
Random Noise
 VTDI has less random noise, getting better std. deviation
42
Comparison TDI
Random Noise
 VT-12K5X shows the less standard deviation than compared camera
(i.e VT-12K5X has better random noise characteristics)
Histogram Distribution Comparison
43
Image
Model Comparison TDI
Standard
Deviation
13 e 30 e
1.24 DN 2.8 DN
* Test Conditions: 10x (20 dB) Gain / Dark Condition
Dark Noise
 VT-12K has about 2 times less dark noise
44
Image
Model Comparison TDI
Standard
Deviation
2.5 DN 3.7 DN
* Test Conditions: 10x Gain / 120 Target Grey Level
Comparing Images
 VTDI 12K vs Comparison TDI
45
Comparing Images
 Single line scan vs 256 TDI line scan
46
Comparing Images
 Dual line scan vs 128 TDI line scan
 You can get advantages from VTDI such as
47
 Low power consumption (25% compared to CCD TDI cameras)
 Faster line rate and higher sensitivity
 Higher SNR output (200:1)
 Supporting longer cable distance with CoaXpress interface
 Compact design
 Easy to use and reliable correction features
 Consistent and Superior Image Quality
 No tap mismatch issues typically occurring in the CCD imaging sensors
 Trigger Rescaler
 Strobe output mode
 Lookup Table (Knee Control)
 PRNU Auto Target Level
 You can use unique features of VTDI such as
Advantages and Unique features of VTDI
48
Vieworks Hybrid TDI Cameras
Thank You
Hybrid TDI Cameras Technology

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Vieworks - Hybrid TDI Cameras Technology (Wojciech Majewski)

  • 1. Hybrid TDI Cameras Technology
  • 2. 1/ HYBRID TDI CAMERAS TECHNOLOGY 2/ VIEWORKS TDI CAMERAS 3/ TECHNICAL FEATURES 4/ APPLICATIONS 5/ COMPARISONS Index
  • 3. 1/ HYBRID TDI CAMERAS TECHNOLOGY
  • 4. Time Delay and Integration (TDI) 4 Sensor design that uses multiple line scan stages (up to 512) Captures an image of a moving object while transferring integrated signal charges synchronously line by line with the objects movement The collected signal increases by a factor equivalent to the number of TDI stages or transfers Sensitivity (TDI Stage) 32 Stages 128 Stages 256 Stages 512 Stages Line Rate 34 KHz 300 KHz Resolution 4k 8k 12k 18k 23k Pixel Size 14 10 7 5 3.5 TDI Sensor Concept
  • 5. 5 Time 1 Signal Transfer Object Move Time 2 Time 3 Charge TDI Sensor Concept
  • 6. 6 Single Line Image vs 256 TDI Image SNR 5.9 SNR 73.1 16K Line Scan Image 18K 256 Stage TDI Image TDI Sensor Concept
  • 7. 7 Built-in ADC Digital Output Higher Noise Lower Power Consumption Faster Speed Accumulating the signal electronically, increasing sensitivity Conventional CMOS TDI Sensor Features of CMOS TDI Linear Sensor
  • 8. 8 Noiseless charge transfer & accumulation Features of CCD TDI Linear Sensor Complex additional external circuitry (ADC, H-Driver, Vertical Driver, CCD Amp etc.) High signal-to-noise ratio High power consumption Analog Output Conventional CCD TDI Sensor
  • 9. High Speed 9 (Advantage of CCD) High Sensitivity (Advantage of CMOS) + Vieworks Hybrid TDI Hybrid TDI Sensor Technology
  • 10. 10 Hybrid TDI Sensor Technology Combine Advantage of CCD and CMOS Out Memory Buffer Transfer Signal CCD Structure + Data Readout CMOS Structure High Speed Digital Output CMOS Structure
  • 11. 11 Hybrid TDI Sensor Technology Features of Hybrid TDI Linear Sensor CCD + CMOS Structure Combines a light sensitivity CCD-based TDI pixel array with CMOS readout electronics CCD pixel structure delivers low-noise, high dynamic range CMOS technology enables low-power consumption, fast readouts
  • 12. 12 Better Sensitivity Higher Dynamic Range Lower Power Consumption Higher Speed Hybrid TDI Sensor Technology Advantages Combination of best features of CCD and CMOS
  • 13. 2/ VIEWORKS TDI CAMERAS
  • 14. 14 Vieworks Hybrid TDI Camera Lineup
  • 15. 15 M95 mount VT-16K5X-H140 VT-23K3.5X-H100 M42 mount VT-3K7C-E100 VT-3K7C-H100 VT-4K5C-E100 VT-4K5C-H100 VT-6K3.5C-E100 VT-6K3.5C-H100 VT-3K7X-E250 VT-3K7X-H250 VT-4K5X-E200 VT-4K5X-H200 VT-6K3.5X-E160 VT-6K3.5X-H160 VT-4K7C-H120 M72 mount VT-4K14C-H120 VT-9K7C-H80 VT-12K5C-H60 VT-18K3.5C-H40 VT-6K10X-H170 VT-9K7X-H120 VT-9K7X-H250 VT-12K5X-H100 VT-12K5X-H200 VT-18K3.5X-H80 VT-18K3.5X-H140 Vieworks Hybrid TDI Camera Lineup
  • 16. 16 Supporting M42 / F mounts Dimension: 60 60 36 Cost effective Up to 256 TDI stages Microscopy Compact size and design Dedicated strobe controller (optional) [Mechanical Dimension in ] Vieworks Hybrid TDI Camera Lineup VTDI - M42 Mount
  • 17. 17 M72: 90 90 43 M95: 100 100 42 M72 High Quality & High Performance Up to 256 TDI Stages M95 Vieworks Hybrid TDI Camera Lineup VTDI - M72 & M95 Mount
  • 18. 18 Two Images at once High Sensitivity VT-DI Series Dual Imaging Hybrid TDI Vieworks Next Generation TDI
  • 19. 19 Dark Field (Specializing for Defect) Bright Field (General) VT- DI Dual Imaging Hybrid TDI Acquiring two different images at once!
  • 20. 20 1) Use 2 cameras orOR 2) Inspect 2 times VT- DI Dual Imaging Hybrid TDI If you want to get two different images
  • 21. If you use Dual Imaging TDI Acquiring two images at once! 21 Costs Saving Time Reducing Detection Rates Increasing VT- DI Dual Imaging Hybrid TDI
  • 23. 23 8/10/12 bit Pixel Format VT Series Technical Features_ Summary Programmable TDI Stage Count (256 /192 /128 / 64 / 32) Advanced PRNU, DSNU Correction Pre-emphasis Output for Camera-Link (10m cable @ 85MHz) Bi-direction Scanning Coax-Express Interface(4 CH, 25Gbps) Area Scan Mode for Camera Alignment Built-in Trigger Sync Converter Built-in Programmable Strobe control X2 Binning(H & V), ROI, Horizontal Flip, LUT Function
  • 24. Area Scan mode for camera alignment 24 Area Mode Area Mode Output Image 300% Image
  • 25. Correct Encoder Trigger Input 25 Trigger Rescaler Function
  • 26. WDR, Gamma, Histogram Preprocessing 26 LUT Function
  • 27. Support Multi-Link Functions (1 : 2 output Functions) 27 Euresys DF board Solution: 4 channel bandwidth and Data forwarding When required 2 PCs per 1 Camera for faster processing Multi Link Master PC Slave PC Image Streaming Camera Control Image Streaming
  • 28. 28 Strobe Output Control Strobe Output Control for Exposure Changing
  • 29. 29 Strobe Output Control Strobe Output Control for Exposure Changing Output level differs depending on line speed Output level is constant Image output at motion changes [Continuous illumination] [Strobe illumination]
  • 30. 30 Current Controller High efficiency Fast response speed (1イ) No need of shunt resistance Up to 2A DC current (Max. pulse 10A) M42 TDI Line Scan + Strobe Controller + LED Strobe Output Control Strobe Controller Module for M42 TDI
  • 31. 31 Supporting Multiple Strobes by Combining SCMs Strobe Output Control Strobe Controller Module for M42 TDI
  • 32. Universal LED Strobe Controller 32 Model VLS-PS-40W VLS-PS-150W Current DC (0 2 A) Pulse (0 20 A) DC (0 5A) Pulse (0 25A) Max.Frequency 300 KHz 300 KHz Min.CurrentPulseWidth 1 us 1 us StrobeDelay 0.5 us 0.5 us LEDVoltage Auto (Max 70V) Auto (Max 48V) LEDPower DC 30 W (Pulse 1000W) DC 150 W (Pulse 1000W) Strobe Output Control
  • 34. 34 Applications where it is desired to record a linear movement Applications which operate under low brightness, requiring high-resolution in-line applications requiring high-speed operation with high sensitivity High-speed imaging for low light applications i.e. fluorescence imaging Semiconductor inspection Electronics manufacturing and inspection Letter and film scanning High-speed scanning for large size samples i.e. flat panel displays Continuous imaging of high-speed moving object i.e. satellite imaging Fast automatic sorting of letters and parcels Glass sorting with glass recycling applications Web Inspections Applications TDI Cameras are useful for
  • 37. 37 Specifications VT-12K Comparison TDI SensorType Hybird (CCD + CMOS) CCD Resolution 12480 256 12000 256 PixelSize 5.0 5.0 5.2 5.2 Responsivity(nJ/) 550 DN (@620 ) 300 DN (@500 ) SaturationCapacity 40 Ke- 24 Ke- DarkNoise 23 e- 13 e- (@ Analog Gain 4) 33 e- DynamicRange 64 57 Max.LineRate 100 90.8 Max.LineRate@2Binning 100 82 TriggerInterface CoaXPress / External LVDS (Camera Control Port) CameraInterface CoaXPress HSLink GrabberCompatibility Euresys, Kaya, Silicon Software, Active Silicon, Matrox Dalsa (Xcelera-HS) PowerConsumption 9 W (PoCXP Compliant No need for external power supplies) 36 W (An external power supply is required) Max.CableLength 40 m (CXP6 2 cables) 10 m (HSLink 1 cable) MechanicalDimension 90 90 38 180 90 92.1 Comparisons of 2 TDI cameras (12K)
  • 38. 38 Responsivity (VT-12K vs. others) VT-12K 256 Stage CCD 256 Stage 1 Line 4 Line Wavelength (nm) Responsivity (DN/nJ/cm^2) 380 460 525 640 740 850 940 Responsivity VT-12K has better responsivity at overall wavelength
  • 39. 39 Responsivity VT-12K has better responsivity at all the colors 39 Responsivity Responsivity Measures the inputoutput gain of a detector system In the specific case of a photodetector, responsivity measures the electrical output per optical input Comparison TDI
  • 40. 40 Comparison TDI Shot Noise VT-12K has less shot noise
  • 41. 41 * Test Condition: 5500K White Lighting / 8-bit pixel format / 200 target level Image Model Comparison TDI Standard Deviation 1.6 DN 2.0 DN Random Noise VTDI has less random noise, getting better std. deviation
  • 42. 42 Comparison TDI Random Noise VT-12K5X shows the less standard deviation than compared camera (i.e VT-12K5X has better random noise characteristics) Histogram Distribution Comparison
  • 43. 43 Image Model Comparison TDI Standard Deviation 13 e 30 e 1.24 DN 2.8 DN * Test Conditions: 10x (20 dB) Gain / Dark Condition Dark Noise VT-12K has about 2 times less dark noise
  • 44. 44 Image Model Comparison TDI Standard Deviation 2.5 DN 3.7 DN * Test Conditions: 10x Gain / 120 Target Grey Level Comparing Images VTDI 12K vs Comparison TDI
  • 45. 45 Comparing Images Single line scan vs 256 TDI line scan
  • 46. 46 Comparing Images Dual line scan vs 128 TDI line scan
  • 47. You can get advantages from VTDI such as 47 Low power consumption (25% compared to CCD TDI cameras) Faster line rate and higher sensitivity Higher SNR output (200:1) Supporting longer cable distance with CoaXpress interface Compact design Easy to use and reliable correction features Consistent and Superior Image Quality No tap mismatch issues typically occurring in the CCD imaging sensors Trigger Rescaler Strobe output mode Lookup Table (Knee Control) PRNU Auto Target Level You can use unique features of VTDI such as Advantages and Unique features of VTDI
  • 49. Thank You Hybrid TDI Cameras Technology