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The Physics of Infrared Detectors
(with a special emphasis on
MID-IR detectors)
Massimo Robberto
(ESA  STScI)
Outline
 Semiconductors as crystals
 Energy bands
 Intrinsic semiconductors
 Light on intrinsic semiconductors
 Extrinsic Semiconductors
 Impurity band conductors (IBC)
Periodic Table
Atomic structure: (four 2s2p) covalent bonds per atom
Crystal Structure: 2-d
simple cubic
Bravais lattice R ma nb pc
  

  
In two dimensions, there are
five distinct Bravais lattices
Crystal Structure: 3-d
simple cubic body-centered cubic face centered cubic
In three dimensions, there are fourteen distinct Bravais lattices
A large number of semiconductors are cubic
(a1=a2=a3= a lattice constant)
Diamond Structure
Diamond Structure
Diamond Structure
Diamond Structure
Diamond Structure
Diamond Structure
Diamond Structure
Diamond Structure
Diamond Structure
Two interpenetrating face-centered cubic lattices
Diamond lattice:
All same atoms
(e.g. Si)
Zincblende lattice:
different atoms
in each sublattice
(e.g.CdTe, GaAs)
Lattice planes in crystals:
Miller indexes
Silicon and Germanium break on {1,1,1} planes
never confuse the spacing between lattice planes
with the spacing between crystal planes
Example
The surface density of Silicon is
14 2
14 2
14 2
11.8 10 atoms/cm on {111}
9.6 10 atoms/cm on {110}
6.8 10 atoms/cm on {100}
Wigner-Seitz cell
The smallest (primitive) cell which displays the full symmetry
of the lattice is the Wigner-Seitz cell.
Construction method: surfaces passing through the middle points
to the nearest lattice points
In 3-d think to a polyhedron
Reciprocal lattice
g ha kb lc
  
  

  
The Bravais lattice after Fourier transform
real space reciprocal lattice
normals to the planes(vectors) points
spacing between planes 1/distance between points
(actually, 2/distance)
 (distance, wavelength) 2逸k (momentum, wave
 number)
Bravais cell Wigner-Seitz cell
Reciprocal lattice
Bragg conditions
When a wave impinges on a crystal - and it doesn't matter if it is an electromagnetic wave,
e.g. X-rays, or an electron, or neutron "wave" - it will be reflected at a particular set
of lattice planes {hkl} characterized by its reciprocal lattice vector g only if the so-called
Bragg condition is met
k k g

 
  
If the Bragg condition is not met, the incoming wave just moves through the lattice
and emerges on the other side of the crystal (neglecting absorption)
Elastic scattering
k k

 
For a given k, The Bragg conditions is met on surfaces
normal to particular g.
These surfaces define cells in the k-space, called
Brillouin zones
Brillouin Zone construction
All wave vectors that end on a BZ, will fulfill the Bragg condition and thus are diffracted.
Wave vectors completely in the interior of the 1. BZ, or in between any two BZs, will never get
diffracted; they move pretty much as if the potential would be constant, i.e. they behave very close
to the solutions of the free electron gas.
First BZ
Second BZ
Brillouin zone
The Brillouin zone is defined in the reciprocal lattice.
The first BZ is the volume enclosed within a Wigner-Seitz cell in
the k-space.
In 3-d think to a nested set of polyhedra
Third BZ
WS zone and BZ
Lattice Real Space Lattice K-space
bcc WS cell Bcc BZ (fcc lattice in K-space)
fcc WS cell fcc BZ (bcc lattice in K-space)
The WS cell of bcc lattice in real space transforms to a Brillouin zone in a fcc lattice in
reciprocal space while the WS cell of a fcc lattice transforms to a Brillouin zone of a bcc
lattice in reciprocal space.
Bcc: body-centered cubic; fcc: face-centered cubic
Brillouin zone of Silicon
Points of high-symmetry on the Brillouin zone have specific
importance. The most important point for optoelectronic devices
is the center at k = 0, known as the gamma point .
Note the points , X, W, K,
Wave vectors near or at a BZ - let's call
them kBZ
electrons - feel the periodic
potential of the crystal while the others do
not. E.g., they are diffracted.
ENERGY GAP in CRYSTALS
 On the BZ it is k=-k: these are two standing waves
described by  ~eikr
and 刻 e-ikr
 Their combination can be symmetric
刻常eikr
+ e-ikr
~ cos(kr)
or antisymmetric
刻 eikr
- e-ikr
~ sin(kr)
 The probability density 刻 have different values at
each point
 2 different values of the energy, varying with k on the
BZ: ENERGY GAP.
 
2
BZ
E(k ) = 賊 ( )
2
k
U g
m
Energy bands
2
2
( ) ( ) ( )
2
k k k
V r r E r
m
 
 
   
 
 

If V(r) is periodic with periodicity of the lattice, then the wave
Function is a plane wave (free electron) with periodic modulation
( ) ( , ) Block function
ik r
k n
r e U k r
 
 
k is a wave vector in the reciprocal lattice, Un(k,r) is periodic in r,
i.e. U(r+R)=U(r), and n is the band index.
-For a given n, it is sufficient to use ks in the primitive cell of the
reciprocal lattice (Brillouin zone). The rest is redundant!
F. Block solved the Shroedinger equation for an electron in the
lattice:
Band Structure and Blochs
Theorem
( ) ( , ) Block function
ik r
k n
r e U k r
 
 
From:
It is also:
( )
( ) ( , ) ( )
i K g r
k g n k
r e U k g r r
 
 
   
Then:
( ) ( )
E k g E k
 
for dispersion curves
that have a different origin
There are many energy values for
one given k. In particular, all
possible energy values are contained
within the first Brillouin zone
(between -1/2g1
and +1/2g1
in the
picture).
Band Structure and Blochs
Theorem
reduced representation of the band diagram
Every energy branch in principle should carry
an index denoting the band (often omitted)
Energy functions of a periodic potential
The electron at k1can go to the upper
band if someone gives him
1. E > bandgap, AND
2. k2=kl+g
THIS IS THE BRAGGS LAW FOR
INELASTIC SCATTERING
Band diagram of Silicon
 Si has a band gap of about 1 eV.
 Si is an indirect semiconductor because the maximum of the valence band (at )
does not coincide with the minimum of the conduction band (to the left of X).
Direct and Indirect
Semiconductors
Simplified band diagram
Conduction band
Valence band
Eg bandgap
1.24
( )
co
g
E eV
Fermi Energy and Carrier Concentration
Density of electrons in the energy interval E, E + E =
density of states  probability for occupancy  energy interval
The number (or density) of something is given by the density of
available places times the probability of occupation.
( ) ( , )
dN D E f E T dE
Density of states
2 2
2
k
k
E
m


A free (or under constant potential)
particle in a rectangular box has:
1) only kinetic energy
2) k is discrete (stationary waves)
, , , ,
2
x y z x y z
k n
L

緒
Therefore, the energy is quantized
 
2
2
2 2 2
2
2
k x y z
E n n n
m L

 
  
 
 

kx
ky
kz
Density of states Ds
 In phase space a surface of constant energy is a sphere.
The volume is
Any "state", i.e. solution of the Schroedinger equation
with a specific k, occupies with 2 electrons the volume
 The number of cubes fitting inside the sphere at energy
E thus is the number of all energy levels up to E:
3
4
3
V k


3
2
k
V
L

 
緒 
 
3 3
2
2
3
k
s
V k L
N
V 
 
3/ 2
1/ 2
3 2 2
1 1 2
2
s
s
dN m
D E
L dE 
 
   
 

Finally:
Density of states Ds
At 0 K one can place electrons up to the Fermi level EF
3/ 2
1/ 2
2 2
1 2
2
s
m
D E
Probability of occupancy
F
E-E
kT
1
f(E,T)=
e 1

Fermi
distribution
E  EF
>> kT
Fermi level
Intrinsic Semiconductors
Si
HgCdTe
InSb
The concentration of electrons in the conduction band is
3/ 2 2
( ) ( , )
c
F
E
e
E
E E
e KT
eff
Eg
KT
n D E f E T dE
N e
AT e








effective density of states
at the band edge
3/ 2
2
2
4
e e
eff
m kT
N
h
 
 
  
 
With A=4.831021
electrons m-3
K-3/2
.
The nr. of electrons in the conduction band depends on Eg and T.
In Si ne
doubles for ~8 degree rise in temperature
Same for the holes in the valence band:
ne
=nh
=ni
INTRINSIC CONCENTRATION
And the mass action law is
 
3
3/2
2
2
2
4
g
E
i e p kT
e h
kT
n n n e m m
h
 
 
 
   
 
Eg
(300 K) = 1.1242 eV
Eg
(0 K) = 1.700 eV
The bandgap energy and the effective mass depend on T
for Silicon:
The CONDUCTIVITY
 
e e h h
e n n
  
 
The mobility 袖 is the proportionality constant between the average drift velocity vD
of carriers in the presence of an electrical field E:
D
v E


Mobility depends on the average time between scattering processes
s
e
m

 
decreases with Eg. Leakage currents are lower in large Eg
materials.
Radiation on intrinsic
semiconductors
 at low T the conduction band is empty. Low intrinsic
conductivity
 radiation with h>Eg creates electron-hole pairs: ne
=nh
 both electrons and holes contribute to the photocurrent,
depending on mobilities
 The conductivity changes: PHOTOCONDUCTOR
 
e e h h e e h h
e n n n n
    
     
Where
ne,h
= quantum efficiency)  photon flux)
 all atoms count: absorption occurs in thin layer (~10micron)
Extrinsic semicondictors
Semiconductor
donors
acceptors
Doped semiconductors
N-type and p-type
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( , , )
e e
eff c F
n N f E E T

( , , )
A A A F
N N f E E T


 
1 ( , , )
h h
eff V F
n N f E E T
 
 
1 ( , , )
D D A F
N N f E E T

 
e h
A D
n N n N
 
  
Charge neutrality
gives EF and therefore the concentrations
Extrinsic semiconductors
Normally :
Dopant or majority vs.  residual impurities
Ex: Si:Ga (III group) is p-type
Si:As (V group) is n-type
 There are shallow- and deep-level impurities
 shallow-level impurities increase the  response
 Atoms of dopant and residual impurities do not interact
with each other.
 p-type: at low T the conduction band is empty; donor
impurities have lost their electrons and are ionized, acceptor
dopant has electrons from valence band and impurities; valence
band has free holes.
D A
N N

D A
N N

D A
N N
Opposite requirements
To move away and collect charges we need an electric field:
To have a good drop of potential, no current must flow:
Detector material must have high impedence
(I.e. low conductivity)
On the other hand, we want high concentration of absorbers:
this goes in the direction of high conductivity
x
dV
E
dx
Impurity band conduction
The donor band (As in Si:As ) can be heavily doped
Photons are absorbed
 in thin layer (smaller volume)
 providing higher QE
 higher radiation immunity
 lower applied bias
 better uniformity
 faster response
High dopant concentration creates a band ~1meV wide,
thus the cutoff increasees from 24 to 28m.
However:
The donor band becomes a conduction band:
Impurity Band Conduction
Impurity band conduction
The donor band (As in Si:As ) is heavily doped
Electric field is applied (bias) and the free charge carriers
are driven out from the IR active region (depletion):
High resistance and high electric field
Transparent contact (V+)
Blocking layer (intrinsic Si)
IR active region (heavily As doped)
Substrate (heavily doped n-type) at ground
Problem: charges hop in the impurity conduction band;
If they are sensed there is an extra dark current: need for a blocking layer (BIB)
h+ e-
Photo-electrons and relative holes are collected
hole
Si:As Engeneering
 Dopant As is n-type. P-type impurities (e.g.
B) are a potential problem
 They are neutralized by As, leaving them
as negative charge centers in the depletion
region
 These NA charges create an electric field
that limits the extention of the depletion
region w
Poisson equation for the ionized impurities:
0 0 0 0
x A
dE eN
dx k k

 

 
1/ 2
2
0 0
2
b B B
A
k
w V t t
eN

 
  
 
 
-tB
The width of the depletion region depends on the bias and
on the impurity concentration
Assuming NA = 1012
cm-3
and Vb = 1V it is w=32m
An acceptable arsenic concentration is ND=3 x 1017
cm-3
.
For arsenic in silicon, the absorption cross section is Si:As= 2.2 x 10-15
cm2
the absorption length is l=1/ ND Si:As = 15m.
Since l<w, a high quantum efficiency detector can be built.
Most of the failures in detector processing have to do with unwanted impurities,
and the improvement of the performance of this detector type is closely linked to
driving down NA.
Spitzer Si:As (BIB)
128x128 array

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MassimoRobberto033456756577754446105.ppt

  • 1. The Physics of Infrared Detectors (with a special emphasis on MID-IR detectors) Massimo Robberto (ESA STScI)
  • 2. Outline Semiconductors as crystals Energy bands Intrinsic semiconductors Light on intrinsic semiconductors Extrinsic Semiconductors Impurity band conductors (IBC)
  • 3. Periodic Table Atomic structure: (four 2s2p) covalent bonds per atom
  • 4. Crystal Structure: 2-d simple cubic Bravais lattice R ma nb pc In two dimensions, there are five distinct Bravais lattices
  • 5. Crystal Structure: 3-d simple cubic body-centered cubic face centered cubic In three dimensions, there are fourteen distinct Bravais lattices A large number of semiconductors are cubic (a1=a2=a3= a lattice constant)
  • 14. Diamond Structure Two interpenetrating face-centered cubic lattices Diamond lattice: All same atoms (e.g. Si) Zincblende lattice: different atoms in each sublattice (e.g.CdTe, GaAs)
  • 15. Lattice planes in crystals: Miller indexes Silicon and Germanium break on {1,1,1} planes never confuse the spacing between lattice planes with the spacing between crystal planes
  • 16. Example The surface density of Silicon is 14 2 14 2 14 2 11.8 10 atoms/cm on {111} 9.6 10 atoms/cm on {110} 6.8 10 atoms/cm on {100}
  • 17. Wigner-Seitz cell The smallest (primitive) cell which displays the full symmetry of the lattice is the Wigner-Seitz cell. Construction method: surfaces passing through the middle points to the nearest lattice points In 3-d think to a polyhedron
  • 18. Reciprocal lattice g ha kb lc The Bravais lattice after Fourier transform real space reciprocal lattice normals to the planes(vectors) points spacing between planes 1/distance between points (actually, 2/distance) (distance, wavelength) 2逸k (momentum, wave number) Bravais cell Wigner-Seitz cell
  • 20. Bragg conditions When a wave impinges on a crystal - and it doesn't matter if it is an electromagnetic wave, e.g. X-rays, or an electron, or neutron "wave" - it will be reflected at a particular set of lattice planes {hkl} characterized by its reciprocal lattice vector g only if the so-called Bragg condition is met k k g If the Bragg condition is not met, the incoming wave just moves through the lattice and emerges on the other side of the crystal (neglecting absorption)
  • 21. Elastic scattering k k For a given k, The Bragg conditions is met on surfaces normal to particular g. These surfaces define cells in the k-space, called Brillouin zones
  • 22. Brillouin Zone construction All wave vectors that end on a BZ, will fulfill the Bragg condition and thus are diffracted. Wave vectors completely in the interior of the 1. BZ, or in between any two BZs, will never get diffracted; they move pretty much as if the potential would be constant, i.e. they behave very close to the solutions of the free electron gas.
  • 23. First BZ Second BZ Brillouin zone The Brillouin zone is defined in the reciprocal lattice. The first BZ is the volume enclosed within a Wigner-Seitz cell in the k-space. In 3-d think to a nested set of polyhedra Third BZ
  • 24. WS zone and BZ Lattice Real Space Lattice K-space bcc WS cell Bcc BZ (fcc lattice in K-space) fcc WS cell fcc BZ (bcc lattice in K-space) The WS cell of bcc lattice in real space transforms to a Brillouin zone in a fcc lattice in reciprocal space while the WS cell of a fcc lattice transforms to a Brillouin zone of a bcc lattice in reciprocal space. Bcc: body-centered cubic; fcc: face-centered cubic
  • 25. Brillouin zone of Silicon Points of high-symmetry on the Brillouin zone have specific importance. The most important point for optoelectronic devices is the center at k = 0, known as the gamma point . Note the points , X, W, K,
  • 26. Wave vectors near or at a BZ - let's call them kBZ electrons - feel the periodic potential of the crystal while the others do not. E.g., they are diffracted.
  • 27. ENERGY GAP in CRYSTALS On the BZ it is k=-k: these are two standing waves described by ~eikr and 刻 e-ikr Their combination can be symmetric 刻常eikr + e-ikr ~ cos(kr) or antisymmetric 刻 eikr - e-ikr ~ sin(kr) The probability density 刻 have different values at each point 2 different values of the energy, varying with k on the BZ: ENERGY GAP.
  • 28. 2 BZ E(k ) = 賊 ( ) 2 k U g m
  • 29. Energy bands 2 2 ( ) ( ) ( ) 2 k k k V r r E r m If V(r) is periodic with periodicity of the lattice, then the wave Function is a plane wave (free electron) with periodic modulation ( ) ( , ) Block function ik r k n r e U k r k is a wave vector in the reciprocal lattice, Un(k,r) is periodic in r, i.e. U(r+R)=U(r), and n is the band index. -For a given n, it is sufficient to use ks in the primitive cell of the reciprocal lattice (Brillouin zone). The rest is redundant! F. Block solved the Shroedinger equation for an electron in the lattice:
  • 30. Band Structure and Blochs Theorem ( ) ( , ) Block function ik r k n r e U k r From: It is also: ( ) ( ) ( , ) ( ) i K g r k g n k r e U k g r r Then: ( ) ( ) E k g E k for dispersion curves that have a different origin There are many energy values for one given k. In particular, all possible energy values are contained within the first Brillouin zone (between -1/2g1 and +1/2g1 in the picture).
  • 31. Band Structure and Blochs Theorem reduced representation of the band diagram Every energy branch in principle should carry an index denoting the band (often omitted) Energy functions of a periodic potential The electron at k1can go to the upper band if someone gives him 1. E > bandgap, AND 2. k2=kl+g THIS IS THE BRAGGS LAW FOR INELASTIC SCATTERING
  • 32. Band diagram of Silicon Si has a band gap of about 1 eV. Si is an indirect semiconductor because the maximum of the valence band (at ) does not coincide with the minimum of the conduction band (to the left of X).
  • 34. Simplified band diagram Conduction band Valence band Eg bandgap 1.24 ( ) co g E eV
  • 35. Fermi Energy and Carrier Concentration Density of electrons in the energy interval E, E + E = density of states probability for occupancy energy interval The number (or density) of something is given by the density of available places times the probability of occupation. ( ) ( , ) dN D E f E T dE
  • 36. Density of states 2 2 2 k k E m A free (or under constant potential) particle in a rectangular box has: 1) only kinetic energy 2) k is discrete (stationary waves) , , , , 2 x y z x y z k n L 緒 Therefore, the energy is quantized 2 2 2 2 2 2 2 k x y z E n n n m L kx ky kz
  • 37. Density of states Ds In phase space a surface of constant energy is a sphere. The volume is Any "state", i.e. solution of the Schroedinger equation with a specific k, occupies with 2 electrons the volume The number of cubes fitting inside the sphere at energy E thus is the number of all energy levels up to E: 3 4 3 V k 3 2 k V L 緒 3 3 2 2 3 k s V k L N V 3/ 2 1/ 2 3 2 2 1 1 2 2 s s dN m D E L dE Finally:
  • 38. Density of states Ds At 0 K one can place electrons up to the Fermi level EF 3/ 2 1/ 2 2 2 1 2 2 s m D E
  • 39. Probability of occupancy F E-E kT 1 f(E,T)= e 1 Fermi distribution E EF >> kT Fermi level
  • 41. The concentration of electrons in the conduction band is 3/ 2 2 ( ) ( , ) c F E e E E E e KT eff Eg KT n D E f E T dE N e AT e effective density of states at the band edge 3/ 2 2 2 4 e e eff m kT N h With A=4.831021 electrons m-3 K-3/2 . The nr. of electrons in the conduction band depends on Eg and T. In Si ne doubles for ~8 degree rise in temperature
  • 42. Same for the holes in the valence band: ne =nh =ni INTRINSIC CONCENTRATION And the mass action law is 3 3/2 2 2 2 4 g E i e p kT e h kT n n n e m m h Eg (300 K) = 1.1242 eV Eg (0 K) = 1.700 eV The bandgap energy and the effective mass depend on T for Silicon:
  • 43. The CONDUCTIVITY e e h h e n n The mobility 袖 is the proportionality constant between the average drift velocity vD of carriers in the presence of an electrical field E: D v E Mobility depends on the average time between scattering processes s e m decreases with Eg. Leakage currents are lower in large Eg materials.
  • 44. Radiation on intrinsic semiconductors at low T the conduction band is empty. Low intrinsic conductivity radiation with h>Eg creates electron-hole pairs: ne =nh both electrons and holes contribute to the photocurrent, depending on mobilities The conductivity changes: PHOTOCONDUCTOR e e h h e e h h e n n n n Where ne,h = quantum efficiency) photon flux) all atoms count: absorption occurs in thin layer (~10micron)
  • 47. Ruby The ruby mineral (corundum) is aluminum oxide with a small amount (about 0.05%) of chromium which gives it its characteristic pink or red color by absorbing green and blue light. 4.35ct avg 10mm red serengeti ruby, ACNTV PRICE $74.95 @ www.jewelrytelevision.com
  • 48. ( , , ) e e eff c F n N f E E T ( , , ) A A A F N N f E E T 1 ( , , ) h h eff V F n N f E E T 1 ( , , ) D D A F N N f E E T e h A D n N n N Charge neutrality gives EF and therefore the concentrations
  • 49. Extrinsic semiconductors Normally : Dopant or majority vs. residual impurities Ex: Si:Ga (III group) is p-type Si:As (V group) is n-type There are shallow- and deep-level impurities shallow-level impurities increase the response Atoms of dopant and residual impurities do not interact with each other. p-type: at low T the conduction band is empty; donor impurities have lost their electrons and are ionized, acceptor dopant has electrons from valence band and impurities; valence band has free holes. D A N N D A N N D A N N
  • 50. Opposite requirements To move away and collect charges we need an electric field: To have a good drop of potential, no current must flow: Detector material must have high impedence (I.e. low conductivity) On the other hand, we want high concentration of absorbers: this goes in the direction of high conductivity x dV E dx
  • 51. Impurity band conduction The donor band (As in Si:As ) can be heavily doped Photons are absorbed in thin layer (smaller volume) providing higher QE higher radiation immunity lower applied bias better uniformity faster response High dopant concentration creates a band ~1meV wide, thus the cutoff increasees from 24 to 28m. However: The donor band becomes a conduction band: Impurity Band Conduction
  • 52. Impurity band conduction The donor band (As in Si:As ) is heavily doped Electric field is applied (bias) and the free charge carriers are driven out from the IR active region (depletion): High resistance and high electric field Transparent contact (V+) Blocking layer (intrinsic Si) IR active region (heavily As doped) Substrate (heavily doped n-type) at ground Problem: charges hop in the impurity conduction band; If they are sensed there is an extra dark current: need for a blocking layer (BIB) h+ e-
  • 53. Photo-electrons and relative holes are collected hole
  • 54. Si:As Engeneering Dopant As is n-type. P-type impurities (e.g. B) are a potential problem They are neutralized by As, leaving them as negative charge centers in the depletion region These NA charges create an electric field that limits the extention of the depletion region w
  • 55. Poisson equation for the ionized impurities: 0 0 0 0 x A dE eN dx k k 1/ 2 2 0 0 2 b B B A k w V t t eN -tB The width of the depletion region depends on the bias and on the impurity concentration Assuming NA = 1012 cm-3 and Vb = 1V it is w=32m
  • 56. An acceptable arsenic concentration is ND=3 x 1017 cm-3 . For arsenic in silicon, the absorption cross section is Si:As= 2.2 x 10-15 cm2 the absorption length is l=1/ ND Si:As = 15m. Since l<w, a high quantum efficiency detector can be built. Most of the failures in detector processing have to do with unwanted impurities, and the improvement of the performance of this detector type is closely linked to driving down NA. Spitzer Si:As (BIB) 128x128 array